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Semiconductor and Material Spectroscopy Laboratory
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High optical and structural quality of GaN epilayers grown on

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High optical and structural quality of GaN epilayers grown on

by Mufasila Mumthaz Muhammed, M. Peres, Y. Yamashita, Y. Morishima, S. Sato, N. Franco, K. Lorenz, A. Kuramata, Iman Salem Roqan
Year: 2014

Bibliography

M. M. Muhammed, M. Peres, Y. Yamashita, Y. Morishima, S. Sato, N. Franco, K. Lorenz, A. Kuramata and I. S. Roqan, High optical and structural quality of GaN epilayers grown on 201 beta-Ga2O3, Applied Physics Letters 105, 042112, 2014.

Abstract

​Producing highly efficient GaN-based optoelectronic devices has been a challenge for a long time due to the large lattice mismatch between III-nitride materials and the most common substrates, which causes a high density of threading dislocations. Therefore, it is essential to obtain alternative substrates with small lattice mismatches, appropriate structural, thermal and electrical properties, and a competitive price. Our results show that ( 2 ¯ 01 ) oriented β-Ga2O3 has the potential to be used as a transparent and conductive substrate for GaN-growth. Photoluminescence spectra of thick GaN layers grown on ( 2 ¯ 01 ) oriented β-Ga2O3 are found to be dominated by intense bandedge emission. Atomic force microscopy studies show a modest threading dislocation density of ∼108 cm−2. X-ray diffraction studies show the high quality of the single-phase wurtzite GaN thin film on ( 2 ¯ 01 ) β-Ga2O3 with in-plane epitaxial orientation relationships between the β-Ga2O3 and the GaN thin film defined by 010 β-Ga2O3 || ( 112 ¯ 0 ) GaN and ( 2 ¯ 01 ) β-Ga2O3 || 0001 GaN leading to a lattice mismatch of ∼4.7%. Complementary Raman spectroscopy indicates that the quality of the GaN epilayer is high.

Keywords

III-V semiconductors Epitaxy X-Ray Diffraction Photoluminescence
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