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Semiconductor and Material Spectroscopy Laboratory
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Structural and Optical Characterization of Eu-implanted GaN

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Structural and Optical Characterization of Eu-implanted GaN

by K.P. O’Donnell, Iman Salem Roqan, K. Wang, K. Lorenz, E. Alves, M. Bockowski
Year: 2009

Bibliography

K Lorenz, N P Barradas, E Alves, I S Roqan, E Nogales, R W Martin, K. P. O’Donnell, F. Gloux and P Ruterana, Structural and optical characterization of Eu-implanted GaN, J. Phys. D: Appl. Phys. 42,165103 2009.

Abstract

GaN was implanted with 300 keV Eu ions over a wide fluence range from 1 × 1013 to 1 × 1016 Eu cm-2 at room temperature RT or 500 °C. Detailed structural and optical characterizations of the samples were performed using Rutherford backscattering spectrometry and channelling, transmission and scanning electron microscopy, wavelength dispersive x-ray emission and RT cathodoluminescence CL spectroscopy. RT implantation results in a sigmoidal-shaped damage build-up curve with four regimes that were correlated with the formation of specific kinds of defects. After annealing at 1000 °C only samples implanted to fluences below 0.8 × 1015 Eu cm−2 showed near complete recovery of the crystal. Implantation at elevated temperature significantly decreases the implantation damage and increases the fraction of Eu incorporated on substitutional Ga-sites. The improved structural properties of samples implanted at elevated temperature are reflected in a higher intensity of Eu-related red light emission after annealing at 1000 °C. The RT CL intensity is correlated with the number of Eu ions on substitutional Ga-sites after annealing. Furthermore, a detailed study of optical activation shows that the optimum annealing temperature depends on the implantation fluence due to the sensitive balance of defects removed and created during high temperature annealing

Keywords

Ion Implantation Excitation Mechanism Europium Luminescence Photoluminescence Gallium Nitride Photoluminescence/Excitation PL/E Spectroscopy Eu-Implanted Gan Physics Electronic Optical and Magnetic Materials Atomic and Molecular Physics
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